Detailed explanation of the overload effect and protection method of the tension sensor
Many people have problems in the process of using the tension sensor, but do not know how to solve it. The following Ocean Xiaobian explains the consequences of the overload of the pressure sensor and the protection method.
There are many forms of tensile pressure sensors, and the design methods of overload protection for each type of structure are also different. Many methods have their own advantages and disadvantages. Small-range, high-sensitivity tensile pressure sensors using MEMS technology usually have flat membranes and islands. Membrane, beam film and other structures are generally implemented by bumps and other methods when designing overload protection. The forming methods include back etching technology, silicon direct bonding technology, and glass etching technology. However, these structures generally have a large limitation in that the cavity size is large, the sensitivity is further limited, and the utilization of the silicon wafer is reduced, the complexity of the manufacturing process is increased, and the production cost is increased.
The pull pressure sensor has many parameter indicators, one of which is overload protection. The overload is the overload, which exceeds the rated load of the equipment itself. The phenomenon is that the current is too large, the electrical equipment is heated, and the long-term overload of the line will reduce the line insulation level. Even burning sensor equipment or wiring; overload protection is that even if the load exceeds the rated load, there will be no burnout of the line, but there is also a degree, generally 150%, and can not continue to work overload.
At present, the research focus of small-range and high-sensitivity tensile pressure sensors is concentrated on the sacrificial layer structure tensile pressure sensor. This is mainly because the elastic diaphragm of the sacrificial layer structure tensile pressure sensor is very thin, and the thickness can be 2 μm or even thinner. In such a thin structure, if a strained resistor of a tensile pressure sensor is used as a sacrificial layer structure, the thickness of the strain sensor is relatively large, which has a great influence on the stress distribution of the elastic diaphragm, which is disadvantageous for the sacrificial layer structure tensile pressure sensor. Performance optimization, so the use of polycrystalline silicon nanofilms to produce strain resistors can take advantage of the sacrificial layer technology.
Overload protection is a consideration for each type of sensor, as it may occur that the measured value is greater than the range during use. Only sensors designed with overload protection can be used better and used longer. How to design the overload protection of each sensor, the overload range is different, so no matter which sensor you buy, you must know how much overload protection it has, so that it can be used more conveniently and in the future. There is also no case of burning the circuit due to overload.